New Paper ‒ Atomic Layer Deposition of SnOx onto Mesoporous, Nanocrsytalline TiO2 and SnO2 Thin Films
July 27, 2019
The atomic layer deposition of tetrakisdimethylamidotin(IV) and water on mesoporous thin films of nanocrystalline anatase TiO2, rutile SnO2, and rutile TiO2 was investigated. For all deposition conditions tested, highly oxygen deficient coatings were created, and purge time and temperature were … Read more